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Miniature Piezo Motor / Slide for High Volume Applications
High-Dynamics Fast Steering Mirror Platforms Provide Larger Deflection-Angles
New High-Performance Piezo Actuators and High-Voltage Amplifiers
DuraAct™ Piezocomposite Patch Transducers for Adaptronics and Smart Structures
NEXACT®: Novel Compact OEM Piezo Stepping Motor / Actuator with Long Travel Range
Open-Frame XY Piezo-Motor Stage with Linear Encoders
Miniature Linear Translation Stage

Capacitance Sensors

Ultra-High-Resolution Sensors

D-015 Sub-Nanometer-Resolution Capacitive Position Sensors

  • Measuring Range to 1000 Micron
  • Resolution <0.01 Nanometer
  • Linearity to 0.003 %
  • Bandwidth to 10 kHz
  • Integrated Linearization System (ILS)
  • Custom Designs


PI capacitive (capacitance) position sensors are absolute-measuring, high-dynamics nano-metrology devices providing the highest linearity and accuracy. PI capacitance sensors / signal conditioner electronics make use of a high-frequency AC excitation signal for enhanced bandwidth and drift-free measurement stability (subnanometer stability over several hours). Advantages: Single & dual-plate probes for greater flexibility, bandwidth to 10 kHz, sub-nanometer resolution, custom multi-sensor electronics (analog & digital) available, closed loop motion controllers available.

More Information...

Brochure: Capacitive Nanometrology Sensors
Design & Characteristics of PI Sensors
Reasons for Choosing PI
Test and Quality Control
 




NEW!

PI Capacitive Position Sensors, Metrology Solutions Brochure

D-510 Single-Probe Capacitive Nanometrology Gauge


PISeca capacitive displacement sensors perform non-contact measurements of geometric quantities representing separation, position, length or other linear dimension against electrically conductive references such as metallic planes. These single-probe sensors combine superior resolution and linearity with very high bandwidth for dynamic measurements.
Standard come with measuring ranges from 20 to 1000 µm. Capacitive position gauges such as PISeca are fundamentally very temperature stable and easy to work with.

Features & Advantages
  • Sub-Nanometer Resolution, Measuring Ranges to 500 µm
  • Absolute, Non-Contact Measurement of Distance / Motion / Vibration
  • Multi-Axis Measurements Possible
  • Excellent Measuring Linearity to 0.1 %
  • Plug & Play: Easy Setup and Integration
  • Very Temperature Stable
  • Bandwidth to 10 kHz
  • Guard-Ring Electrode Design for Better Sensor Linearity
  • ILS Linearization System in the Signal Conditioner Electronics Improves Output Signal Linearity
  • All Systems Factory Calibrated for Highest Possible Linearity / Accuracy
 
E-852 Signal Conditioner Electronics for D-510
E-509.E03 • E-509.E3 3-Channel Electronics for D-510 PISeca Sensors