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Miniature Piezo Motor / Slide for High Volume Applications
High-Dynamics Fast Steering Mirror Platforms Provide Larger Deflection-Angles
New High-Performance Piezo Actuators and High-Voltage Amplifiers
DuraAct™ Piezocomposite Patch Transducers for Adaptronics and Smart Structures
NEXACT®: Novel Compact OEM Piezo Stepping Motor / Actuator with Long Travel Range
Open-Frame XY Piezo-Motor Stage with Linear Encoders
Miniature Linear Translation Stage
Piezo Flexure Nanopositioning & Scanning Stages (Piezostages)

Piezo-Motor-Driven Stages (Long Travel)

Single Axis Piezo Stage Systems Piezo Z-Stages & Actuators Microscopy Z-Stages & Z/Tip/Tilt Stages PIFOC® Objective Scanners Multi-Axis Piezo-Stages without Aperture

Resolution <0.1 nm
Flexure-Guided
PICMA® Piezo Drives
Flexure Guidance
Travel: to 1000 micron
Low Profile
Clear Aperture
PICMA® Piezo Drives
Travel: to 500 µm/4 mrad

Sub-nm Resolution
Fast Response
Travel: 460 Micron
Compact Designs
Sub-nm Resolution
Closed- & Open-Loop

Multi-Axis Piezo Stages with Aperture NEXLINE® / NEXACT® Nanopositioning Drives Piezo Tip/Tilt
Mirrors		 Piezo Motor
Stages & Actuators		 Piezo
Controllers

XY / XYZ / Z Axis
Vacuum Compatible
SGS or Capacitive
    Sensors
Travel: 3 mm-20 mm
Sub-nm Resolution
Force to 600 N
1 to 3 Axes
With or w/o Sensors
Deflection Angle to 6°
Long Travel to 50 mm
XY Stages
Speed to 1000mm/sec
1 - 12 Channels
Digital & Analog
Static/Dyn Linearization
 

PI is the global leader in piezoelectric nanoposition-
ing and scanning stages.

Advantages of PI Piezo Stage systems are: frictionless flexure designs, parallel kinematics (better multiaxis trajectory control), parallel metrology (keeps motion of all controlled axes inside the servo loop), capacitive feedback (direct measuring, non contact), digital control (wider dynamic range, better linearity, autocalibration…).

More Information...

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Selection Guides
Experience / Custom Systems
Reasons for Choosing PI
Test and Calibration
 

   Single Axis Piezo Stage Nanopositioning Systems

Product Image - Miniature Piezo Nanopositioning/Scanning Stage with Direct Metrology

P-780 Miniature Piezo Stage Nanopositioning/Scanning System with Direct Metrology


  • Fast Response (1 kHz Resonant Frequency)
  • Stainless Steel Construction
  • Frictionless Precision Flexure Guiding System
  • 80 Micron Travel Range
  • Direct Metrology with LVDT Sensor
  • Resolution <5 Nanometer
  • PICMA® High-Performance Multilayer Piezo Drives
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Product Image - High-Load Piezo-Driven Nanopositioning Piezo Stage with Direct Metrology

P-750 High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology


  • 10 kg Load Capacity
  • 1 Nanometer Lateral Guiding Precision
  • Resolution <1 Nanometer
  • PICMA® High-Performance Multilayer Piezo Drives
  • Fast Response
  • 75 Micron Travel Range
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Frictionless Precision Flexure Guiding System
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - PIHera Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology

P-620.1 – P-629.1 PIHera® Miniature Long-Range Piezo-Stage Nanopositioning System with Direct Metrology


  • XY-Travel to 1800 µm
  • Compact Design
  • Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Compact OEM PZT Nanopositioning Stage

P-712 Low-Profile OEM Piezo Stage / Scanner


  • High Dynamics, 5 ms Settling Time
  • 30 µm Travel Range
  • Resolution to 0.2 nm
  • Compact Design, Low Profile, 40 x 40 x 6 mm
  • Clear Aperture, 25 x 15 mm
  • PICMA® Long Life Piezo Drives
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Product Image - Ultra-Compact Open-Loop PZT Nanopositioning Stage

P-772OL Ultra-Compact Open-Loop PZT Nanopositioning PiezoStage


  • Small Flexure-Guided Stage
  • 50 Picometer Resolution
  • 10 Micron Travel
  • Ultra-Fast Response (1.7 kHz Resonant Frequency)
  • Closed-Loop Version Available
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Product Image - Ultra-Compact Open-Loop PZT Nanopositioning Stage

P-772 Ultra-Compact Piezo Stage NanoAutomation® System with Direct Metrology


  • Smallest Flexure-Guided Stage with Capacitive Feedback
  • Ideal for Head/Media Test & Fiber Optics
  • Resolution <0.1 nm
  • Ultra-Fast Response (1.7 kHz Resonant Frequency)
  • ID-Chip for Auto Calibrate Function
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Ultra-Compact Open-Loop PZT Nanopositioning Stage

P-752 Piezo NanoAutomation® Stages with Direct Metrology


  • Ultra-Fast Response
  • Ultra-Precise Trajectory Control
  • Digital Controllers with Fast FiberLink Interface Available
  • ID-Chip for AutoCalibrate Function
  • Direct-Metrology Capacitive Sensors for Highest Precision
  • 0.1 nm Resolution
  • PICMA® High-Performance Multilayer Piezo Drives

Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Ultra-Compact Open-Loop PZT Nanopositioning Stage

P-753 LISA Piezo NanoAutomation® Stages / Actuators with Direct Metrology


  • Unique Design: Both Piezo-Stage and Piezo Actuator
  • Frictionless Precision Flexure Guiding System
  • 0.05 nm Resolution
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Ultra-Fast Response, Very Compact
  • PICMA® High-Performance Multilayer Piezo Drives
  • ID-Chip for Auto Calibrate Function
  • Vacuum Versions Available
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Product Image - PiezoMove High-Precision Lever Amplified Z-Actuator with Flexure Guiding

P-601 PiezoMove® High-Precision Lever Amplified Z-Actuator with Flexure Guiding


  • Flexure Guidance for Frictionless, Ultra-Straight Motion
  • Travel Ranges to 480 Micron
  • Resolution to 0.2 Nanometer
  • High Dynamics and Stiffness
  • PICMA® High-Performance Piezo Actuators
  • Open and Closed-Loop Versions
  • Ideal for OEM Applications
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Product Image - PiezoMove High-Precision Actuator with Flexure Guiding

P-602 PiezoMove® Flexure Actuator with High Stiffness. Integrated Guiding System, High Force and Large Travel Ranges


  • Frictionless Flexure Guiding System for Straight Motion Integrated Motion
  • Amplifier for Travel Ranges to 1 mm
  • High Dynamics and Stiffness, Forces to 400 N, Backlash-Free Construction
  • Outstanding Lifetime Due to PICMA® Piezo Actuators
  • Available with Integrated Position Sensor
  • Custom Designs with Larger Travel or Faster Response and Non-Magnetic Versions Feasible
  • Ideal for OEM-Applications in Adaptronics, Biotechnology or Microfluidics
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Product Image - PiezoMove High-Precision Lever Amplified with Flexure Guiding

P-603 PiezoMove® Linear Actuator: Low-cost and with Large Travel Ranges


  • Frictionless, High-Precision Flexure Guiding System
  • Travel Ranges to 500 µm
  • Cost-Effective Design Outstanding Lifetime Due to PICMA® Piezo Actuators
  • Available with Integrated Position Sensor
  • Ideal OEM Actuators for Precision Motion Control in Optics, Medical, Biotech and Microfluidics Applications
  • Custom Designs with Larger Travel or Faster Response and Non-Magnetic Versions Feasible
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Product Image - IHera Vertical Piezo Nanopositioning Stages with Direct Metrology

P-620.Z · P-621.Z · P-622.Z PIHera® Piezo-Z Nanopositioning Stages with Direct Metrology


  • Z-Axis Travel to 400 Micron
  • Low Profile
  • Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - M-714 Hybrid Piezo Z-Stage

M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage


  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 2 Nanometer Linear Encoder Resolution
  • High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments
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    Z-/Tip/Tilt Stages (with Aperture)

Product Image - PI nano™ Z, Low Profile, Low Cost, High-Speed Piezo-Z Slide Scanner

P-736 PI nano™ Z, Low Profile, Low Cost, High-Speed Piezo-Z Slide Scanner


  • Extremely Fast Step & Settle, From 5 msec
  • Low Profile for Easy Integration: 20 mm (0.8")
  • 100 and 200 µm Travel Ranges
  • Longest Lifetime with Proprietary PICMA® Piezo Technology
  • Cost Effective due to Low-Cost Piezoresistive Sensors
  • Compatible w/ Leading Image Acquisition Software Packages
  • Closed-Loop Control for High Repeatability and Accuracy
  • 24 Bit USB Controller & Software Included

Product Description

Product Image - P-737 PIFOC® Z-Axis Microscopy Piezo Stage for High-Resolution Sample Positioning and Scanning

P-737 PIFOC® Z-Axis Microscopy Piezo Stage for High-Resolution Sample Positioning and Scanning


  • High-Speed Piezo Z-Motion with Travel Ranges to 250 µm
  • Nanometer Resolution
  • Large Clear Aperture to Accommodate Specimen Holders
  • Perfect Mechanical Fit to XY OEM Manual or Motorized Stages
  • Sub-Millisecond Response Times

Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Nanopositioning Stage With Aperture

P-732 High-Dynamics Vertical Nanopositioning/Scanning Stage


  • High Stiffness for High-Dynamics Operation
  • Up to 15Micron Vertical Travel Range
  • <1 Nanometer Resolution
  • Straightness of travel <10 microradian
  • Clear Aperture with 25 mm Diameter
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Compact Piezo Elevation Stage with Aperture

P-612 Compact Piezo Elevation Stage with Aperture


  • Small Footprint: 60 x 60 mm
  • For Cost-Sensitive Applications
  • 100 Micron Travel
  • Range Resolution to 0.2 Nanometer
  • Clear Aperture : 20 x 20 mm
  • PICMA® High-Performance Multilayer Piezo Actuators
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Product Image - Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy

P-541.ZSL Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy


  • Lower Profile for Easy Integration: 16.5 mm
  • Z and Tip/Tilt Versions
  • Fast Response
  • 100 Micron Linear Travel Range
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
  • Combination with Long Travel Microscopy Stages
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Product Image - Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology

P-541.ZCD Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology


  • Lower Profile for Easy Integration: 16.5 mm
  • Z and Tip/Tilt Versions
  • Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • 100 Micron Linear Travel Range, 1 milliradian Tilt
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
  • Ideal for fast Z-Stack Acquisition and 3D Deconvolution Imaging
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology

P-528 Z/Tip/Tilt Flexure Nanopositioning / Scanning Piezo Stages with Parallel Metrology


  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 Micron / 4 milliradian
  • Clear Aperture 66 x 66 mm
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • PICMA® High-Performance Multilayer Piezo Drives
Product Description | Specs / Drawings | Ordering Info | PDF
     PIFOC® Objective Scanners

Product Image - PIFOC High-Speed Microscope Objective Nanofocusing/Scanning Z-Drives

P-720 PIFOC® High-Speed Microscope Objective Nanofocusing/Scanning Z-Piezo Drives


  • Scans and Positions Objectives with Sub-Nanometer Resolution
  • Low Inertia for Fast Settling
  • Frictionless Precision Flexure Guiding System
  • Travel to 100 Micron
  • Straightness of Travel ≤13 microradian
  • PICMA® High-Performance Multilayer Piezo Drives
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Product Image - PIFOC High-Speed Nanofocusing/Scanning Z-Drives with Direct Metrology

P-721 PIFOC® High-Speed Nanofocusing/Scanning Z-Piezo-Stage with Direct Metrology


  • Scans and Positions Objectives with Sub-Nanometer Resolution
  • High Linearity and Stability with Direct-Measuring Sensors
  • Travel to 100 Micron, fast Settling Time
  • Very Straight Motion for Enhanced Focus Stability
  • Ask about DIC Prism Holder Option
  • Compatible with MetamorphTM Imaging Software
  • Quick Lock Adapter for Easy Attachment
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - IFOC Long-Range, High-Speed Nanofocusing Z-Drives with Direct Metrology

P-725 PIFOC® Long-Range, High-Speed Nanofocusing Z-Drives with Direct Metrology


  • Scans and Positions Objectives with Sub-Nanometer Resolution
  • High Linearity and Stability with Direct-Measuring Capacitive Sensors
  • Travel to 460 Micron, Fast Response & Settling Time
  • Frictionless Precision Flexure Guiding System
  • Enhanced Guiding Precision for Better Focus Stability
  • Ask about DIC Prism Holder Option
  • Controller Compatible with MetamorphTM Imaging Software
  • Quick Lock Adapter for Easy Attachment
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - P-737 PIFOC® Z-Axis Microscopy Piezo Stage for High-Resolution Sample Positioning and Scanning

P-737 PIFOC® Z-Axis Microscopy Piezo Stage for High-Resolution Sample Positioning and Scanning


  • High-Speed Piezo Z-Motion with Travel Ranges to 250 µm
  • Nanometer Resolution
  • Large Clear Aperture to Accommodate Specimen Holders
  • Perfect Mechanical Fit to XY OEM Manual or Motorized Stages
  • Sub-Millisecond Response Times

Product Description | Specs / Drawings | Ordering Info | PDF

    Multi-Axis Stages without Aperture

Product Image - Compact Z and XZ Piezoelectric Nanopositioning Systems

P-611.ZS · P-611.XZS Compact Z and XZ Piezoelectric Nanopositioning Systems


  • Small Footprint: 44 x 44 mm
  • 100 Micron Travel
  • Range Resolution to 0.2 Nanometer
  • For Cost-Sensitive Applications
  • PICMA® High-Performance Multilayer Piezo Actuators
  • Open- and Closed-Loop Models
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Compact X and XY Piezoelectric Nanopositioning Systems

P-611.1 · P-611.2 Compact X and XY Piezoelectric Nanopositioning Systems


  • Small Footprint: 44 x 44 mm
  • 100 Micron Travel
  • Range Resolution to 0.2 Nanometer
  • For Cost-Sensitive Applications
  • PICMA® High-Performance Multilayer Piezo Actuators
  • Z-Stage also Available
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Modular XY and XYZ Piezo Flexure Nanopositioning Stages

P-281 Modular XY and XYZ Piezo Flexure Nanopositioning Stages


  • Cost-Effective XZ (XY) & XYZ Positioning
  • Travel Ranges to 100 x 100 x 100 Micron
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Product Image - PIHera Long-Range XY Piezo Nanopositioning Stages with Direct Metrology

P-620.2 – P-629.2 PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology


  • XY-Travel to 1800 µm
  • Compact Design
  • Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - PicoCube High-Speed, XY(Z) Piezo Stages for Nanotechnology, SPM, AFM

P-363 PicoCube® High-Speed, XY(Z) Piezo Stages for Nanotechnology, SPM, AFM

&
  • Ultra-High-Performance Closed-Loop Scanner for AFM/SPM
  • Compact Manipulation Tool for Nanotechnology
  • Resonant Frequency 9.8 kHz
  • Ultra-High-Precision Capacitive Feedback
  • Parallel-Motion Metrology for Highest Linearity and Stability
  • 50 Picometers Resolution
  • 5 x 5 x 5 Micron Travel Range
  • Very Small Package
  • Rugged Design
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - NanoCube XYZ Piezo Nanopositioning Systems

P-611.3S · P-611.3O NanoCube® XYZ Nanopositioning Piezo System


  • 100 x 100 x 100 Micron Travel Range
  • Very Compact: 44 x 44 x 44 mm
  • 1 Nanometer Resolution
  • Ideal for Fiber-Alignment and Photonics Packaging Applications
  • Optional E-760 Controller Card Features Built-In Optical Metrology
  • Closed- and Open-Loop Versions
  • Flexure-Guided Precision Trajectory Control
  • Fast Scanning and Settling
  • Large Variety of Controllers
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Product Image - Six-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage with Parallel Metrology

P-587 Six-Axis, Long-Travel Nanopositioning / Scanning Piezo-Stage with Parallel Metrology


  • For Scanning and Positioning in all Six Degrees of Freedom
  • 800 x 800 x 200 Micron Linear Range
  • Up to 10 mad Rotational Range
  • Precision Trajectory Control
  • Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • ID-Chip for Auto Calibration Function
  • PICMA® High - Performance Multilayer Piezo Drives
Product Description | Specs / Drawings | Ordering Info | PDF

    Multi-Axis Piezo-Stages with Aperture

Product Image - Low-Profile OEM XY Piezo-Scanners for Imaging Applications

P-714 Low-Profile OEM XY Piezo-Scanners for Imaging Applications


  • Ideal for Interlacing, CCD Resolution Enhancement
  • Compact Size of only 45 x 45 x 6 mm
  • Clear Aperture
  • Highly Cost - Efficient Design
  • 15 x 15 Micron Travel Range
  • Parallel - Kinematics Design for Higher Dynamics
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Compact XY Piezo-Nanopositioner with Aperture

P-612.2 Compact XY Piezo-Nanopositioner with Aperture


  • Small Footprint : 60 x 60 mm
  • 100 x 100 Micron Travel Range
  • Resolution to 0.8 Nanometer
  • For Cost-Sensitive Applications
  • Clear Aperture: 20 x 20 mm
  • PICMA ® High-Performance Multilayer Piezo Actuators
  • Z-Stage also Available
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Product Image - Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology

P-541.2SL Low-Profile, Parallel-Kinematics XY Piezo Stages for Scanning Microscopy


  • Low Profile for Easy Integration: 16.5 mm
  • Parallel Kinematics for Fast Response
  • To 200 x 200 Micron Travel Range
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology

P-542.2CD Low-Profile, Scanning Microscopy XY Piezo Stages with Parallel Metrology


  • Low Profile for Easy Integration: 16.5 mm
  • Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision, Decoupling of X-Y-Z Motion
  • Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • To 200 x 200 Micron Travel Range
  • Direct Drive Version for High-Speed Positioning & Scanning
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology

P-733 Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology


  • Higher Speed Through Direct Drive
  • Up to 2.2 kHz Resonant Frequency in X and Y
  • 30 x 30 or 30 x 30 x 10 Micron Travel Range
  • 100 Picometers Resolution
  • Capacitive Sensors for Highest Linearity
  • Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision, Decoupling of X-Y-Z Motion
  • Active Runout Compensation
  • 50 x 50 mm Clear Aperture
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Vacuum Compatible Option
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Product Image - XY Piezo Nanopositioning / Scanning Stages with Parallel Metrology

P-733 XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology


  • 100 x 100 Micron Travel Range
  • For XY Scanning & Positioning
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision, Decoupling of X-Y-Z Motion
  • Precision Flexure-Guiding System
  • Integrated Capacitive Sensors for Resolution <0.3 Nanometer
  • 50 x 50 mm Clear Aperture
  • Ultra-High Vacuum Version Available
  • Ultra-Fast XY and XYZ Versions Available
  • PICMA® High-Performance Multilayer Piezo Drives
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology

P-734 Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology


  • Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
  • Low Bow: Flatness in the Low Nanometer Range
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness, Decoupling of X-Y-Z Motion
  • 100 x 100 Micron Travel Range
  • Direct-Metrology Capacitive Sensors for Higher Precision
  • 56 x 56 mm Clear Aperture
  • PICMA®High-Performance Multilayer Piezo Drives
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology

P-517 · P-527 Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology


  • XYΘ, XYZ and XY Versions
  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 Micron
  • Clear Aperture to 66 x 66 mm
  • PICMA® High-Performance Multilayer Piezo Drives
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Product Image - NanoCube XYZ Piezo NanoAlignment Systems with Parallel Metrology

P-615 NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology


  • 350 x 350 x 250 Micron Closed-Loop Travel Range
  • Parallel-Kinematics Design & Direct Capacitive Metrology for Higher Multi-Axis Accuracy
  • Compact Design : 80 x 80 x 42 mm (Open & Closed-Loop Versions)
  • 10 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Drives
  • 1 Nanometer Resolution
  • Ideal for Alignment and Photonics Packaging Applications Vacuum Compatible to 10-6 hPa
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - PIMars XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology

P-562 PIMarsTM XYZ Piezo Stages / Scanners with Parallel Metrology


  • To 300 x 300 x 300 Micron Travel Range
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / X-Y-Z Decoupling, Low Bow
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • 66 x 66 mm Clear Aperture
  • Six-Axis Custom Versions
  • Ultra-Fast XY and XYZ Versions Available
  • Ultra-High-Vacuum Versions up to 10-9 hPa Available
  • Invar, Super-Invar and Titanium Versions Available
  • PICMA® High-Performance Multilayer Piezo Drives
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology

P-545 PI nano™ XY & XYZ 1x3 Piezo Stage Systems


  • Low Profile for Easy Integration: 20 mm (0.8“)
  • Large Aperture for 1x3"Slides. Accessories & Holders Available
  • All Parts Black Anodized for Minimum Reflections
  • 200µm Standard Travel Range, Longer Ranges Available
  • Longest Lifetime with Proprietary PICMA® Piezo Technology
  • Cost Effective due to Low-Cost Piezoresistive Sensors
  • Compatible w/ Leading Image Acquisition Software Packages
  • Closed-Loop Control for High Repeatability and Accuracy
  • Millisecond Step Time, ideal for Super-Resolution Microscopy
  • Recessed Sample Holders for Maximized Utility

Product Description | Download the Tools for Microscopy Catalog | Controller Manual | Request Quote
Product Image - Large-Aperture, XY Piezo Nanopositioning / Scanning Stage with Parallel Metrology with Parallel Metrology

P-770 Large-Aperture, XY Piezo Nanopositioning / Scanning Stage with Parallel Metrology with Parallel Metrology


  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • For XY Scanning and Positioning
  • 200 x 200 mm Clear Aperture
  • 200 x 200 Micron Range
  • Closed-Loop Resolution <10 Nanometer
  • PICMA® High-Performance Piezo Drives

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Product Image - Six-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage with Parallel Metrology

P-587 Six-Axis, Long-Travel Piezo Stage Nanopositioner with Parallel Metrology


  • For Scanning and Positioning in all Six Degrees of Freedom
  • 800 x 800 x 200 Micron Linear Range
  • Up to 10 mad Rotational Range
  • Precision Trajectory Control
  • Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • ID-Chip for Auto Calibration Function
  • PICMA® High - Performance Multilayer Piezo Drives
Product Description | Specs / Drawings | Ordering Info | PDF
NEXLINE® / NEXACT® Linear Nanopositioning Drives
Prodcut Image - NEXLINE Miniature High-Load Piezo Nanopositioning Drive

N-310 Compact NEXACT® OEM Piezo Stepping Motor with Long Travel Ranges


  • 20 mm Standard Travel Range
  • Compact and Cost-Effective Design
  • 0.03 nm Resolution
  • To 10 N Push/Pull Force
  • Low Operating Voltage
  • Self Locking, with no Heat Dissipation, Nanometer Stability
  • Non-Magnetic and Vacuum-Compatible Working Principle
Product Description | Specs / Drawings | Ordering Info | PDF
Prodcut Image - NEXLINE Miniature High-Load Piezo Nanopositioning Drive

N-111 NEXLINE® OEM Linear Actuator Nanopositioning Over Long Travel, PiezoWalk® Principle


  • Travel Range 10 mm
  • Resolutionto 0.025 nm Open-Loop,5 nm Closed-Loop
  • Up To 50 N Force Generation and 70 N Holding Force
  • Self-Locking at Rest, No Heat Generation
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible
Back to Top Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - NEXLINE High-Load Piezo Nanopositioning Drive

N-216 NEXLINE® Linear Actuator High-Force PiezoWalk® Drive for Long-Range Nanopositioning


  • Travel Range 20 mm
  • Resolutionto 0.03 nm Open-Loop, 5 nm Closed-Loop
  • Up to 800 N Holding Force
  • Self-Locking at Rest
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible
Product Description | Specs / Drawings | Ordering Info | PDF

Piezo-Motor-Driven Stages